Periodic sub-wavelength structures with large phase retardation fabricated by glass nanoimprint

Glass nanostructures fabricated by soft thermal nanoimprint

An one-step, fast and potential low cost process has been developed to fabricate silica like glass nanostructures by combining sol-gel chemistry and thermal nanoimprint. An inorganic-organic sol-gel thin film is patterned at low pressure and temperature with flexible stamps. Various geometries are achieved with a patterning resolution of about 150 nm and patterns aspect ratio higher than 4. To ...

Large area high density sub-20 nm SiO(2) nanostructures fabricated by block copolymer template for nanoimprint lithography.

We developed simple fabrication methods to effectively transfer the block copolymer nanopatterns to a substrate material. High aspect ratio, sub-20 nm nanopillar and nanohole structures are successfully fabricated in a SiO(2) layer in large area format, and the versatile utilities of these nanostructures as nanoimprint molds are studied. Nanoimprint lithography using these molds makes it possib...

Fabrication of Thermally Durable Sub-wavelength Periodic Structures upon Inorganic--Organic Hybrid Materials by Nano-imprinting

We fabricated sub-wavelength periodic structures by thermal nano-imprinting using our original functionally modified inorganic–organic hybrid materials. The fabricated structures exhibited excellent uniformity and surface smoothness over a large imprinted area. In addition, optical transmittance is more than 90% within visible wavelength regions after heat treatment for 2 h at 300 C. These nano...

Solid state microcavity dye lasers fabricated by nanoimprint lithography

Single sub-20 nm wide, centimeter-long nanofluidic channel fabricated by novel nanoimprint mold fabrication and direct imprinting.

We report and demonstrate a new method to fabricate single fluidic-channels of uniform channel width (11-50 nm) and over 1.5 cm in length, which are essential to developing innovative bio/chemical sensors but have not been fabricated previously. The method uses unconventional nanofabrication (a combination of crystallographic anisotropic etching, conformal coating, and edge patterning, etc.) to...